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AR magnetron sputtering coating machine

Equipment introduction：

The AR sputtering coating machine is a multifunctional coating equipment for producing color films and AR+AF anti reflective films in the fields of mobile phones and automobiles. It is single door structure with multiple targets installed inside: 4 pairs (8) of targets, which can achieve continuous coating of multiple layers of different materials, and can coat ultra-thick film of over 500nm. (Target positions can be added according to customer needs) ◆ The product hanging structure inside the chamber is detachable and can rotate at a high speed of over 60 rpm. The rotation speed can be steplessly adjusted by touch screen, and the entire equipment operation status can be visually displayed.

AR film, various color films, mobile phone panels, car panels, mobile phone camera covers, mobile phone color covers, etc.

Stable Sputtering Coating Technology

The company's unique target tube structure design, multi-segment gas path control technology, constant pressure control gas volume, can achieve stable control of magnetron sputtering rate. Online real-time monitoring film thickness design ensures the uniformity of the film layer and product consistency, achieving the uniformity and color consistency of various gas reaction film layers.

◆Chamber size： VSD 1621 （1600*2100）（Size can be customized）
VSD 1821 （1800*2100）（Size can be customized）
VSD 2527（2500*2700）（Size can be customized）

◆Vacuum system：Water Vapor Cryopump (below -135 ° C) Rotary pump (RP)+Molecular Booster Pump (MBP)+Turbomolecular pump (TMP)
◆Process power supply: MF power supply
◆Control system: imported programmable controller, touch screen;